In microsystems, the surface area size effect often becomes a dominant factor under specific conditions. To investigate this phenomenon, we designed a curved spring, a slider, and a spring-loaded silicon-based micro-mechanical structure to explore micro-tribology. The primary goal is to analyze how the size effect influences the behavior of microstructures by varying the relationship between the slider's contact area and the feature scale.
The microstructure was fabricated using a bulk silicon process. After etching, the silicon components were bonded to a substrate through a bonding technique. A thin plating layer was applied on the glass surface to ensure proper electrostatic and electrical signal transmission. Since corner effects significantly influence the performance, the deflection at each critical point—particularly the right-angled corners—was carefully calculated. The overall displacement was determined by considering the deformation caused by these joints.
The main concept behind the design is to study the impact of the area effect on friction by adjusting the nominal contact area between the micro-slider and the glass base. Additionally, an electrostatic force is applied between the slider and the base to modify the distance between them, allowing us to examine the spacing effect on friction.
A probe applies both pulling and pressing forces to a pull ring, which in turn exerts force on the slider via the pulling spring and the bending spring. This setup enables the measurement of displacement changes, indirectly allowing for the calculation of frictional forces.
A static analysis was conducted on the curved spring-micro-slider-tension spring system. In this configuration, the curved spring has a width of h and a length of l. Two bending springs are connected in parallel, contributing to the overall mechanical response of the system. This design allows for precise control and measurement of micro-scale interactions, making it ideal for studying tribological behaviors at the micro-level.
300W Led Grow Lights Greenhouse
The 300W retractable led grow lights is a lighting device designed for indoor plant growth. It uses high-brightness LED lamp beads to provide sufficient light energy to meet the needs of plants at different growth stages.
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